Porous silicon free-standing coupled microcavities were grown by an electrochemical attack. The natural drift of the layer thickness and porosity was successfully compensated by changing the etching parameters in a controlled way. Potential applications for CMC structures with controlled optical parameters could be channel filtering within optical telecommunication devices.
|Titolo:||Porous silicon free-standing coupled microcavities|
|Data di pubblicazione:||2003|
|Appare nelle tipologie:||1.1 Articolo su Rivista/Article|