We present the design modelling and fabrication of Silicon-On-Insulator (SOI) nanobeam cavities that are immersed in a microfluidic system for refractive index sensing. The device has sensitivity value of greater than 200 nm/RIU with a Q-factor more than 20 000 in water. It was fabricated on a SOI platform and working at telecom wavelengths. The use of the SOI platform also offers further possibilities of integration with CMOS technologies. Â© 2012 SPIE.
|Titolo:||Silicon-On-Insulator (SOI) nanobeam optical cavities for refractive index based sensing|
|Data di pubblicazione:||2012|
|Appare nelle tipologie:||4.1 Contributo Atti Congressi/Articoli in extenso|